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NOx detection is an innovative approach in CMP (Chemical Mechanical Polishing) process control. CMP smoothens the wafer surface with a combined chemical and mechanical polishing procedure. During production, wafers are coated by a thin layer. To avoid damage to the wafer surface, for instance by stress cracks, the NOx emitted as soon as the wafer is plane and blank must be measured. Therefore, a high-resolution NOx-detector, capable of determining exactly when the polishing process must be stopped, is essential. ...
ByECO Physics AG based in Duernten, SWITZERLAND
FHT products and technology provides advanced coating, cleaning and mixing in the semiconductor ...
ByFluidic High Technology (FHT) based in Wayne, NEW JERSEY (USA)
Hiden plasma probes measure some of the key plasma parameters and provide detailed information relating to plasma reaction chemistry. Plasma diagnostics for applications in etching, deposition, coating and surface modification. ECR – Electron Cyclotron Resonance plasma Magnetron sputtering High power impulse magnetron sputtering, HIPIMS ICP inductively coupled plasma, and RF plasma Dielectric-barrier discharge ...
ByHiden Analytical Ltd. based in Warrington, UNITED KINGDOM
While chip sizes keep shrinking, the challenges for semiconductor manufacturers keep growing. Exploding product mixes, shorter production cycles and new materials are but some of the hurdles production managers and fab owners are facing. ...
ByRobovision BV based in Ghent, BELGIUM
The light of a LED is generated in semiconductor connections. Their performance depends crucially on the quality of these semiconductors. This is where our specialty graphite comes into play: isostatic graphite is fundamental for the production of compound semiconductor layers.These are generated in the “hot zone“ under extreme temperatures during the so-called epitaxy, or MOCVD process. ...
BySGL Carbon SE based in Wiesbaden, GERMANY
SIMS - for depth profiling, surface composition measurement, and elemental imaging, Hiden's SIMS Workstation provides a complete analytical facility. RGA - The Hiden quadrupole mass spectrometers provide high sensitivity detection capability for the most demanding XHV/UHV vacuum environments. The pulse ion counting detector enables measurement of both positive and negative ions through 7 continuous decades, the integral accumulation mode being used for the capture of discreet particle events. UHV Temperature ...
ByHiden Analytical Ltd. based in Warrington, UNITED KINGDOM
At the heart of this transformation are semiconductors. Silicon is the traditional and best known semiconducting material and growth in this market is propelled by the relentless pace of digitisation and connectivity, and the recent surge in artificial ...
ByMorgan Advanced Materials based in Windsor, NORTHERN IRELAND
For this field, GPP offers testing technology and inspection solutions for use under clean room conditions. Cameras integrated in a special housing, in conjunction with lighting specially developed for the clean room, perform measuring and testing ...
ByGPP Chemnitz Gesellschaft für Prozeßrechnerprogrammierung mbH based in Chemnitz, GERMANY
The sensitivity of the AttoMap microXRF enables quantitative analysis of trace levels of dopants in FinFETS and has demonstrated down to 2 nm thickness of high-k dielectric films at 1% repeatability. Acquisition is non-destructive and can be performed within seconds. Ultimate sensitivity for dopants such as Ni, La, Hf, etc. ...
BySigray, Inc based in concord, CALIFORNIA (USA)
Plants within the semiconductor and circuit manufacturing industry deals manufacture semiconductors, computers, printed circuit boards, and other very small electronic components, including transistors, capacitors, inductors, resistors, diodes, insulators and conductors. Semiconductor manufacturing process emissions and pollution control challenges include VOC abatement; acid gas scrubbing; fluid handling; filtration; and laboratory fume hood ...
ByCECO Environmental based in Addison, TEXAS (USA)
XBS Triple Filter Quadrupoles configured for multiple source monitoring in MBE deposition applications. The custom configured ioniser provides for high stability, high senstivity monitoring of oxides and metals from both k-cell and e-gun sources. MBE monitoring and control. Molecular Beam Studies. Multiple beam source analysis. High Performance RGA. Desorption / Outgassing studies / Bakeout cycles. Chamber / Process gas Contaminants. Hiden XBS mass spectrometers for high precision scientific, ...
ByHiden Analytical Ltd. based in Warrington, UNITED KINGDOM
Advanced Facilities can range from pharmaceutical plants to semiconductor factories and require a deep understanding of the complex processes involved with ...
ByGraycor Inc based in Oakbrook Terrace, ILLINOIS (USA)
Hiden Ion Milling Probe – End Point Detector The only dedicated end point determination tool for ion etch control and optimum process quality. End point Analysis. Target Impurity Determination. Quality Control / SPC. Residual Gas Analysis. Leak Detection The IMP is a differentially pumped, ruggedized secondary ion mass spectrometer for the analysis of secondary ions and neutrals from the ion mill process, featuring: High Sensitivity SIMS / MS with Pulse Ion Counting Detector. Triple ...
ByHiden Analytical Ltd. based in Warrington, UNITED KINGDOM
The importance of cleanrooms in the electronic industry. Air purity is essential for efficient production. The laboratories where technicians produce the components installed in smartphones, computers, and all electronic devices are subject to a high environmental control level. Any particles in suspension - commonly called dust - could cause irreparable damage to chips and microprocessors, becoming waste material. To maintain a high-efficiency rate, manufacturers have equipped themselves with clear rooms where ...
ByETG Risorse e Tecnologia S.r.l. based in Chivasso (TO), ITALY
Hybrid halide perovskite semiconductors show excellent promise as a new generation of solid state light emitters. ...
ByEdinburgh Instruments - TECHCOMP Group based in , UNITED KINGDOM
Our cleaners are used in the manufacturing of semiconductors, flat panel displays, CDs, DVDs, and many other electronic items. ...
ByInternational Products Corporation based in Burlington, NEW JERSEY (USA)
The semiconductor industry and the consumer electronics industries use our high purity gases and gas mixtures for numerous applications including ion implantation, plasma etching, and certain chamber cleaning processes. ...
BySpecgas Inc. based in Warminster, PENNSYLVANIA (USA)
In this application note the dynamics of charge carriers in copper-nitrogen-titanium oxide are studied using time-resolved photoluminescence spectroscopy on the FLS980 Photoluminescence ...
ByEdinburgh Instruments - TECHCOMP Group based in , UNITED KINGDOM
The low-contamination shock wave fragmentation process is suitable for processes with high purity requirements. Due to the use of acoustic shock waves and the low level of contact compared to conventional fragmentation methods, metal contamination is kept to a minimum ...
ByImpulsTec GmbH based in Radebeul, GERMANY
For 60 years Shamokin has supplied quality carbon and graphite products for numerous hot metals and industrial applications. Shamokin’s major focus is on the Hot Metals Industry. From Shamokin’s inception Steel Mills, and Foundry Products seemed most logical because they are located directly in the center of the Anthracite Coal Region. Anthracite provides the cleanest and lowest sulfur injection carbon for steel ...
ByShamokin Carbons based in Coal Township, PENNSYLVANIA (USA)