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waste gas treatment Applications

  • Waste gas treatment for the TFT industry

    Manufacturing TFT/LCD displays requires waste gas treatment as well. Processes that produce large scale Thinfilm Transistors (TFT) on glass substrates, for instance, use Chemical Vapour Deposition – CVD – to separate the thin films onto the material. The process requires cleaning the process chamber periodically and usually employs etching with NF3. Etching of the separated thin films typically utilises CF4, SF6 and chlorinated gases, which release large amounts of waste gas mixtures.

    By DAS Environmental Expert GmbH based in Dresden, GERMANY.

  • Waste gas treatment for the LED industry

    Market analysts predict sustained growth in demand in the LED industry. After LED backlighting for the small LC displays of mobile phones and the LC displays of larger screens in the television market, the next potential growth market is the lighting industry: Sales of LEDs in this market in 2012 are almost USD 3.5 billion – thus nearly doubling since 2010. Analysts are expecting a growth of more than USD 7 billion in 2014 and believe that the total market for LEDs should peak at USD 17.7 billion.* A mass market of this scale for LEDs also means increasing emissions that need to be abated by specific waste gas treatment systems at the point of use. In the manufacture of products based on innovative light emitting diode (LED) technology, ammonia and hydrogen are used in large quantities as process gases. The environmental engineers at DAS have recognised this market trend and developed new solutions such as LARCH for waste gas treatment in MOCVD processes.

    By DAS Environmental Expert GmbH based in Dresden, GERMANY.

  • Waste gas treatment for the semiconductor industry

    In the early 1990s no appropriate and comprehensive technical solution had been available for waste gas treatment in the semiconductor industry. Back then as well as today many industrial and research production procedures use process gases and generate waste gases. These waste gases, considered greenhouse gases, are toxic and/or highly flammable and very often pose a significant risk to production facilities and the environment. The semiconductor industry, for instance, uses perfluorocarbons, whose global warming potential is extremely high and therefore requires an efficient waste gas treatment. Combining and transporting different gases into a fab’s central waste gas system might produce highly flammable and highly explosive gaseous mixtures, which in the past has occasionally caused the total loss of entire production facilities. Particles contained within gases may also cause exhaust blockages. To eliminate these risks, process waste gases need to be treated at the “Point-of-Use” (POU) where harmful exhausts are abated immediately.

    By DAS Environmental Expert GmbH based in Dresden, GERMANY.

  • Waste gas & wastewater treatment for the solar industry

    Generating solar energy is considered `green technology`, even though the production of solar cells based on silicon predominantly uses process stages that have been common practice in the semiconductor industry for many years. As in the semiconductor industry the production of solar cells employs dangerous and environmentally harmful substances, which require abatement according to legal provisions. The production of photovoltaic cells therefore is subject to strict requirements for treatment of waste gases and wastewater. Solutions need to be easy and cost-effective. The contaminated wastewaters and waste gases should, under no circumstances, lower performance, endanger the health and safety of humans, or otherwise negatively affect the availability of production facilities. The safety of the production line must be guaranteed at every step and in every operating situation.

    By DAS Environmental Expert GmbH based in Dresden, GERMANY.

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