Process technologies for making solar cells - Energy - Solar Power

Oxford Instruments Plasma Technology has developed a number of processes for the production of Photovoltaics (solar cells) using our flexible and powerful tools and with key technologies.

Processes for Photovoltaics from Oxford Instruments:

  • Plasma Enhanced Chemical Vapour Deposition (PECVD)
  • Atomic Layer Deposition (ALD)
  • Physical Vapour Deposition (PVD)
  • Inductively Coupled Plasma (ICP) Etch

Example photovoltaic applications include:

  • Passivation of interface defects
  • Anti reflective coating
  • Surface texturing
  • Heterojunctions
  • Transparent conductive oxide
  • Edge isolation etch
  • Si thin film