4 products found
Beneq Products
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Semiconductors
The Beneq Transform® is a new class of ALD cluster tool. It uniquely combines automation with both thermal batch and plasma enhanced ALD process modules. The Beneq Transform® offers unparalleled flexibility for processing sequences with multiple ALD process modules to meet wafer capacity. It is designed to be upgradable to meet growing volumes and new ALD processes.
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Beneq Transform - Model 300 - Cluster Tool Semiconductor
Beneq Transform 300 is a highly versatile manufacturing platform intended for IDMs and foundries dedicated to CIS, Power, Micro-OLED/LED, Advanced Packaging and other MtM applications. It is a highly configurable solution that caters to multiple advanced thin-film applications ranging from gate dielectric to passivation and/or encapsulation and ...
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Beneq Transform - High-Throughput Semiconductor
Versatile, automated ALD solution for high-throughput semiconductor ...
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Beneq Prodigy - Compound Semiconductor Device
The simple and elegant ALD solution for compound semiconductor device ...
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Research
Beneq is the most installed ALD equipment provider for academic research and corporate R&D. Our products have been designed to minimize cross contamination in a multi-user research environment. Wide range of options and upgrades for the most demanding research requirements.
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Beneq - Model TFS 200 - Research Equipment
ALD research equipment that grows with you. Beneq TFS 200 is the most flexible ALD research platform ever designed for academic research and corporate R&D. Beneq TFS 200 has specifically been designed to minimize any cross contamination that could happen in a multi-user research environment. The large number of available options and upgrades means that your Beneq TFS 200 will grow with you to meet even the most demanding research ...