2 products found
OAI Products
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UV Energy Analyzer
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OAI - Model 311 - UV Intensity Analyzer with 9 Point Probe
Adjusting aligner optics is vital to precise, high yield wafer processing. OAI's Model 311 Intensity Profiler combines superb human engineering and measurement accuracy expressly for that purpose. It employs a unique bar-graph display that presents a graphic portrayal of the percent deviation of each intensity level from a reference plane. The companion nine-sensor probe enables the user to continuously measure light intensity at nine points on the wafer ...
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OAI - Model 316 - UV Energy Analyzer for Perkin Elmer Projection Aligner
Originally designed for use with the Series 100, 200 and 300 Perkin-Elmer Projection Mask Aligners, the microprocessor-based Model 316 Exposure Analyzer monitor allows storage and recall of multiple exposure parameters (intensity, energy, and time) collected from the exposure series. It calculates percent deviation and averages energy. AC or battery operation. For 310, 365, 380, 400, and 436 nm wavelengths. Other wavelengths are ...