1 products found
Tokyo Electron Limited (TEL) Products
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FPD - Plasma Etch/Ash
FPD Plasma Etch/Ash systems generate plasma in its vacuum chamber to etch thin-film and make electric circuits on large-area glass substrates. Our systems contribute to manufacturing liquid crystal displays (LCDs) or organic light-emitting diode displays (OLEDs) on Gen6/Gen8/Gen10.5 substrate. Since display devices get higher resolution and higher performance, FPD manufacturing increases complexity. In this background, FPD customers select TEL FPD Plasma Etch/Ash systems, which meet their requirements.
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Betelex - FPD Etch/Ash System
Today, to manufacture high-resolution and high-performance displays, the TFT process must become more complex, and higher productivity is required for plasma etch systems. Betelex™ supports up to 5 process chambers and realize significantly higher productivity with smaller footprint and facility cost. Betelex™ can also combine multi-process steps in separated chambers and contribute a sophisticated, up-to-date manufacturing process. ...