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Litmas RPS Remote Plasma Source - Data Sheet
The Litmas RPS is a remote plasma source that delivers high concentrations of reactive gas species to enable effective abatement of environmentally harmful PFC gases. Its small footprint, high performance, ease of use, and low cost of ownership set it apart from competitive abatement solutions that require high upfront investment and high operating ...
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XSTREAM Remote Plasma Source with Active Matching Network - Data Sheet
The high-efficiency Xstream® platform, mounted outside the process chamber, generates neutral, reactive species from stable feed gases for the purposes of surface modification, chamber cleaning, thin-film etch, and plasma-assisted ...
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Rapid OX Remote Plasma Source For Oxygen-Based Processes - Data Sheet
The Rapid OX is the perfect RPS for oxygen processes due to its unique user-insertable and removable quartz chamber liner. The liner reduces recombination of oxygen, ensuring effective transportation of reactive species to the process chamber. With 6kW of power, the Rapid OX dissociates oxygen with variable frequency and power control for optimal performance. The removable and replaceable quartz ...
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