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This combination produces an analyzer that can handle some of the most demanding semiconductor wafer processing applications, while still providing high energy throughputs of 36-48 %. ...
THEIA combines the production-proven design and system components of our commercial solution, APOLLO, in an R&D package that delivers unmatched performance, flexibility, reliability, and safety. THEIA is field upgradeable to accommodate the ever-changing needs of scientists and engineers, enabling a seamless transition from R&D to production. Recipes created with THEIA can be sent to ...
The microPRO™ RTP, a new laser annealing system designed to enable several key process steps in semiconductor, power device and MEMS manufacturing, combines a state-of-the-art laser optic module with 3D-Micromac’s modular semiconductor wafer manufacturing platform. It provides selective annealing with high repeatability and throughput in a versatile system. The microPRO™ RTP ...