Decima - Model CD - Inline Non-Contact Emitter
The Decima CD measures the emitter sheet resistance within crystalline silicon photovoltaic (PV) wafers. This innovative product is the industry’s most accurate and reliable measurement tool that characterizes diffusion and annealing process results. The Decima CD measures sheet resistance at a series of discrete points along the center track of each wafer. Its patented technology provides accurate real-time measurements for process control and optimization. Each measuring head connects to Aurora’s Veritas™, a quality control system for measurement integration and operations. Veritas enables optimization of diffusion and annealing processes by providing operators and process engineers with real-time 3D visualization of intra-furnace dynamics, both spatially and by batch.
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Description
The Decima CD accurately and reliably measures emitter sheet resistance inline at full production speeds. The sensor uses safe reflected infrared light to produce high-resolution characterization of emitter sheet resistance from edge-to-edge on a wafer.
Features
- Non-contacting continuous emitter sheet resistance measurement
- Designed for 100% wafer measurement up to 5000 wafers/hour
- Rock-solid long term measurement stability
- Encoder controlled measurement triggering
- Highly accurate and repeatable
- Compact and easily installed
Benefits
- Allows true characterization of both short and long term furnace behavior
- Eliminates operator error and inconsistencies in offline measurement
- Minimizes wafer damage caused by handling and four-point probe contact measurement
- Reduces labor costs associated with offline sampling and SPC charting
- Rapid payback
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