DS Load - DS Unload
From Solar-Automation
The RENA Direct Stack systems DS Load and DS Unload are designed for loading and unloading of PV inline tools. Key system benefits include simple wafer handling with single side wafer touching, excellent breakage rate, lowest cost of ownership and smallest footprint. The modular concept, with direct stack to lane correlation, enables unique flexibility concerning the lane quantity of the linked inline tool.
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Features and Benefits
- Single side touching of wafers and stress-free transport
- Direct stack to lane correlation
- Extremely low breakage rate
- Lowest cost of ownership
- Smallest footprint
- Fast installation and easy operation
- Min. 10 stacks buffer capability with 400 wafers per stack magazine
- Optimal compatibility to RENA inline wet processing tools
- Modular system
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