Refine by
Remote Plasma Source Equipment & Supplies
4 equipment items found
Manufactured by:Advanced Energy Industries, Inc. based inDenver, COLORADO (USA)
Remote Plasma Source and Power Delivery System that Enables Abatement of Exhaust Gasses. Litmas is an all-in-one remote plasma source combining the power supply, LitmasMatch™ matching network, and plasma chamber into one compact ...
Manufactured by:Advanced Energy Industries, Inc. based inDenver, COLORADO (USA)
Built to outlast and outperform the competition, the Xstream remote plasma source (RPS) is ideal for chamber cleaning purposes. It features a patented ignition method and algorithm as well as a proprietary aluminum-alloy, hard-anodized ...
Manufactured by:Advanced Energy Industries, Inc. based inDenver, COLORADO (USA)
With a unique user-insertable and removable quartz chamber liner, Advanced Energy's Rapid OX is optimal for oxygen-based ...
Manufactured by:ULVAC GmbH based inKirchheim b. München, GERMANY
Enviro Optima - The Resist Strip System with the Highest Throughput, in the Smallest Footprint, with the Lowest ...