LARCH (dry burn) - Point-of-Use Waste Gas Treatment System
From Waste Gas Treatment
LARCH is our latest Point-of-Use waste gas treatment system especially designed for MOCVD processes. It is capable of treating large flows of Hydrogen and Ammonia as well as small flows of metal-organics and dopants, which are typically found in common LED processes. The treatment combination of oxidation und pyrolysis extends DAS´ technology portfolio in a sustainable way. Low investment and operating costs, simple, robust design and low environmental impact (no CO2 emissions, minimum NOx emission) characterize LARCH. The maintenance interval is expected to exceed six months.
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LARCH Operating Principle
The system operates in three steps. First, the process waste gases are introduced through a special packed inlet into the decomposition zone. There decomposition of Ammonia (2NH3 à N2 +3H2) takes place. Following the Hydrogen is electrically ignited and oxidized. The waste gases are burned and oxidized within the reactor (2H2 + O2 à 2H2O). Finally the waste gases are cooled (< 60 °C), which can be released into the environment without any further treatment as they meet the strict German standards for air pollution (TA Luft).
The following equipment options are available for all LARCH systems:
- Power Supply: 3 x 400 V/50 Hz or 3 x 208 V/60 Hz
- Process Tool Interface
- Signal Tower
- Drip Pan
- Earthquake Safety Kit
Your Advantages
- No CO2 emissions: no greenhouse gases, low NOx emissions
- No Wastewater: no trouble with NH4+ wastewater limits
- Treatment of H2 at the Point-of-Use: Maximum Security regarding H2
- Simple and robust Design: low investment costs, low CoO, low maintenance
- Internal Security: H2 dilution in case of fire
Technical Data
- Dimensions (W x D x H):
- 1200 mm x 1000 mm x 1900 mm
- Access to maintenance area on front and back side
- Gas entry: DN40
- Gas outlet: DN300 (standard)
- Exhaust: -8 bis -10 hPa, ~ 3000 m3/h, T < 60 °C
- Heat load from Waste Gas (H2 + NH3): < 100 kW
- Emissions: H2 Exhaust Concentration < 0,1 LEL,
- NH3 Exhaust Concentration meet TA-Luft
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