LumaSense Technologies, Inc., An Advanced Energy Company

- Model Plus+ - DC Power Generators

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Process-Proven, Pulsed DC for Single-Magnetron Reactive Sputtering of Thin Dielectric Films. Pinnacle Plus+ generators deliver DC power in a pulsing configuration enabling reactive sputtering of extremely uniform, high-quality dielectric films. Pinnacle Plus+ generators deliver DC power in a pulsing configuration enabling reactive sputtering of extremely uniform, high-quality dielectric films.

  • Charge clearing during the reverse pulse prevents arcs from developing
  • Adjustable process through frequency and duty cycle control
  • Compact air-cooled design expandable in primary/secondary configurations

Advanced Energy Pinnacle® Plus+ power supplies provide all the advantages of a pulsed-DC solution for reactive processes — in an easily integrated package that increases process efficiency, reduces costs, and offers superior flexibility and latitude. Combining standard DC technology and our patented pulsed-DC technology, the Pinnacle Plus+ power supplies provide higher deposition rates, more repeatable performance, and exceptional film quality compared to complicated and expensive AC-power solutions.

  • Higher deposition and yield rates 
  • Superior film uniformity and quality 
  • Reduced substrate damage caused by arcing 
  • Excellent process flexibility and latitude 
  • Repeatable performance 

  • Adjustable frequency range of 5 to 350 kHz 
  • Variable duty cycle up to 45% 
  • Wide voltage range — single-tap wide impedance range 
  • Superior arc control  
  • Dual output available for multi-chamber production 

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