Pinnacle - Model Plus+ - DC Power Generators
Process-Proven, Pulsed DC for Single-Magnetron Reactive Sputtering of Thin Dielectric Films. Pinnacle Plus+ generators deliver DC power in a pulsing configuration enabling reactive sputtering of extremely uniform, high-quality dielectric films. Pinnacle Plus+ generators deliver DC power in a pulsing configuration enabling reactive sputtering of extremely uniform, high-quality dielectric films.
- Charge clearing during the reverse pulse prevents arcs from developing
- Adjustable process through frequency and duty cycle control
- Compact air-cooled design expandable in primary/secondary configurations
Advanced Energy Pinnacle® Plus+ power supplies provide all the advantages of a pulsed-DC solution for reactive processes — in an easily integrated package that increases process efficiency, reduces costs, and offers superior flexibility and latitude. Combining standard DC technology and our patented pulsed-DC technology, the Pinnacle Plus+ power supplies provide higher deposition rates, more repeatable performance, and exceptional film quality compared to complicated and expensive AC-power solutions.
- Higher deposition and yield rates
- Superior film uniformity and quality
- Reduced substrate damage caused by arcing
- Excellent process flexibility and latitude
- Repeatable performance
- Adjustable frequency range of 5 to 350 kHz
- Variable duty cycle up to 45%
- Wide voltage range — single-tap wide impedance range
- Superior arc control
- Dual output available for multi-chamber production