PreWaClean
From Solar-Wafer
The new design of the RENA PreWaClean guarantees proven cleaning results, minimised water consumption and an outstanding throughput.
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Features and Benefits
- System prepared for the future generation of saws
- Wafer basket:
- Total access to the block during first cleaning step
- Wafers are fixed after unglueing process - Maximum loading length 1.080 mm per run
- Loading length 820 mm also available - Highest throughput, 4 runs per hour by minimal footprint
- During cleaning process no remove of the beam connecting plate necessary
- Solutions for the whole process chain from saw to end of wafer cleaning
- Integrated ultrasonic step
- different recipies with free programmable process steps
- RENA cleaning process know-how
- Cleaning support by detergent concentration
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