Rapid - Model OX - Ideal Remote Plasma Source for Oxygen-Based Processes
From Remote Plasma Source
With a unique user-insertable and removable quartz chamber liner, Advanced Energy's Rapid OX is optimal for oxygen-based processes.
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Ideal for Photoresist Ashing/Carbon Chamber Cleans...
- Ideal for Photoresist Ashing/Carbon Chamber Cleans: Quartz liner reduces oxygen recombination and ensures effective transportation of reactive species to the process chamber
- Perfected Performance: 6 kW of power to dissociate oxygen with variable frequency and power control
- Dependable Design: The chamber and removable insert design offer better reliability than full quartz chambers
Reduce recombination effects and extend the lifetime of oxygen radicals thanks to Rapid OX's removable quartz liner. When compared to anodized chambers, the resultant reactive species extended lifetime improves photoresist strip rates. And because the quartz liner is easily installed or removed by the operator, it decreases downtime and significantly lowers replacement costs.
Benefits
- Significantly reduce downtime and cost of ownership via a removable and replaceable quartz chamber
- Improve process performance thanks to a high dissociation rate and high-density radical generation
- Ensure repeatable, controllable processes with variable frequency tuning and precise power control
- Increase the chamber lifetime and reduce service costs thanks to the reliable design and cooling system
- Improve tool utilization, reduce preventive maintenance, and lower CoO
Features
- Quartz liner makes it ideal for photoresist ashing or carbon chamber clean processes
- Variable frequency matching provides a range of plasma impedance operation, controlled by varying gas chemistry, pressure, and power set point
- Improved thermal management helps ensure long chamber lifetime
- Rapid OX quickly ignites and reaches steady-state operation due to low dynamic pressure overshoot
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