SPRUCE (thermal/wet) - Point-of-Use Waste Gas Treatment System
From Waste Gas Treatment
SPRUCE is a waste gas treatment system that functions without fuel (thermal/wet) and was specifically designed for waste management of CVD processes in the semiconductor industry. Low cost of ownership and a small footprint characterize the equipment, while access for operation and maintenance from the front and back allow for additional space-saving arrangements.
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Operating Principle of the SPRUCE Product Line
Diluted process waste gases are induced through a maximum of four separate inlets a reactor that is heated electrically from the outside. The heat breaks down the waste gases and, depending on the chemical composition of the waste gases and the induced oxidant, various reactions take place. In the subsequent scrubbing stage, gaseous and solid compounds generated by this process are absorbed and cooled down by a suitable scrubbing liquid.
The following equipment options are available for all SPRUCE systems:
- Power Supply: 3 x 400V/50 Hz or 3x 208V/60 Hz
- Heated feed lines and inlets
- Process-Tool-Interface
- Earthquake Safety Kit
- 3-way cross valve for waste gas entries
- Signal Tower
SPRUCE INLINE - Our Basic System for Waste Gas Treatment
SPRUCE INLINE is the combination of the reactor and a downstream scrubber with an integrated demister. The washing liquid is provided by a tank placed in the lower part of the system. The control and operator area is separated by open ground from the process area in front of the system. SPRUCE INLINE can treat a maximum of four process chambers through four independent inlets.
Your Advantages
- Optimized for demanding CVD processes
- Especially low maintenance - high uptime
- No inlet clogging
- Low pressure drop
- Small footprint
- Operation without Fuel Gas
Technical Data
- Dimensions (W x D x H):
- ca. 1000 mm × 1000 mm × 2000 mm
- Access to maintenance area on front and back side
- Gas entry: max. 4 x DN25
- Gas outlet: DN100
Dual Waste Gas Treatment with SPRUCE Twice
SPRUCE TWICE has two independent SPRUCE systems with a common control unit and media supply. The double system can treat a maximum of eight process chambers through eight independent inlets.
Your Advantages
- Optimized for demanding CVD processes
- Especially low maintenance - high uptime
- No inlet clogging
- Low pressure drop
- Small footprint
- Operation without Fuel Gas
Technical Data
- Dimensions (W x D x H):
- ca. 1880 mm × 1000 mm × 2000 mm
- Access to maintenance area on front and back side
- Gas entry: max. 2 x 4 x DN25
- Gas outlet: DN100
Maximum Waste Gas Treatment with SPRUCE DUO
SPRUCE DUO has two independent SPRUCE systems with a common control unit and media supply, which operate in parallel. It treats waste gases from up to four independent inlets from semiconductor process tools. In case of a malfunction or maintenance on one reactor, the other backs up the complete treatment of all waste gases (internal back-up), which ensures the equipment’s near 100 % uptime.
Your Advantages
- Optimized for demanding CVD processes
- Especially low maintenance - high uptime
- No inlet clogging
- Low pressure drop
- Small footprint
- Operation without Fuel Gas
Technical Data
- Dimensions (W x D x H): ca. 1880 mm × 1000 mm × 2000 mm
- Access to maintenance area on front and back side
- Gas entry: max. 2 x 2 x DN25
- Gas outlet: DN100
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