SoLayTec ultrafast ALD for AlOx Video
SoLayTec
SoLayTec is a spin-off company from the Dutch research organisation TNO and established in 2010. The company develops, delivers and services machines for atomic layer deposition (ALD) on solar cells worldwide. The SoLayTec ALD machines are intended for industrial production in the solar market. SoLayTec high volume production equipment will be exclusively sold by RENA GmbH on the market. RENA GmbH is a leading equipment manufacturer in the field of wet chemical processing for the PV industry.
Benefits of Al2O3 and ultrafast ALD
The next generation of industrial silicon solar cells aims at efficiencies of 20% and above. To achieve this goal using ever-thinner silicon wafers, a highly effective surface passivation of the cell (front and rear) is required. Al2O3 is well known in the PV community for its excellent surface passivation properties. Using ALD, Al2O3 will be deposited layer by layer, resulting in a very dense and uniform layer.
Most research institutes and solar cell manufacturers of c-Si solar cells are still in a phase of optimising the process recipe for Al2O3. As the research and development requires low volumes, the PDT (100 wph) is viewed as the best option for this job. When the processes have been optimised, ramping up to high volume will be possible installing the high volume tool from SoLayTec, ready for 3,600 wph.
SoLayTec's ultrafast spatial ALD principle is significantly faster than traditional ALD, making it suitable for industrial application. The wafers are transported at atmospheric pressure on a stream of gas, preventing contamination of the reactor. Moreover the tool has been designed for the lowest cost of ownership, compared to any existing deposition technique (e.g. PVD, and PECVD).
SoLayTec is a spin-off company from the Dutch research organisation TNO and established in 2010. The company develops, delivers and services machines for atomic layer deposition (ALD) on solar cells worldwide. The SoLayTec ALD machines are intended for industrial production in the solar market. SoLayTec high volume production equipment will be exclusively sold by RENA GmbH on the market. RENA GmbH is a leading equipment manufacturer in the field of wet chemical processing for the PV industry.
Benefits of Al2O3 and ultrafast ALD
The next generation of industrial silicon solar cells aims at efficiencies of 20% and above. To achieve this goal using ever-thinner silicon wafers, a highly effective surface passivation of the cell (front and rear) is required. Al2O3 is well known in the PV community for its excellent surface passivation properties. Using ALD, Al2O3 will be deposited layer by layer, resulting in a very dense and uniform layer.
Most research institutes and solar cell manufacturers of c-Si solar cells are still in a phase of optimising the process recipe for Al2O3. As the research and development requires low volumes, the PDT (100 wph) is viewed as the best option for this job. When the processes have been optimised, ramping up to high volume will be possible installing the high volume tool from SoLayTec, ready for 3,600 wph.
SoLayTec's ultrafast spatial ALD principle is significantly faster than traditional ALD, making it suitable for industrial application. The wafers are transported at atmospheric pressure on a stream of gas, preventing contamination of the reactor. Moreover the tool has been designed for the lowest cost of ownership, compared to any existing deposition technique (e.g. PVD, and PECVD).
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