ASTM International

Emerging Semiconductor Technology

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Dec. 31, 1986

Fourth in a series, STP 960 addresses new problems in semiconductor processing for the mid ‘80s. A total of 50 papers cover; Epitaxial Technology; Dielectrics and Junction Formation Techniques; Material Defects, Oxygen and Carbon in Silicon; Yield Enhancement and Contamination Control Aspects; Dopant Profiling Techniques and In-Process Measurements; and Fab Equipment: Automation and Reliability.

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 Price: Price (North America): $64
Price (Elsewhere): $70
 ISSN: 978-0-8031-0459-4
 Launch: 1986

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