
ASTM International
Emerging Semiconductor Technology
Dec. 31, 1986
Courtesy ofASTM International
Fourth in a series, STP 960 addresses new problems in semiconductor processing for the mid ‘80s. A total of 50 papers cover; Epitaxial Technology; Dielectrics and Junction Formation Techniques; Material Defects, Oxygen and Carbon in Silicon; Yield Enhancement and Contamination Control Aspects; Dopant Profiling Techniques and In-Process Measurements; and Fab Equipment: Automation and Reliability.
Most popular related searches
Price: Price (North America): $64
Price (Elsewhere): $70
Price (Elsewhere): $70
ISSN: 978-0-8031-0459-4
Launch: 1986
Stay in the loop!
Select your areas of interest to receive industry updates.