AZoQuantum products

Six way stainless steel chamber (built-in water cooling) capable of reaching vacuum levels up to 10-8 Torr with an optional turbo molecular pump and backed by a choice mechanical pump. Comes with 8” conflat flanges, two of which are designed to be rotatable. Some ports will have either 8" blank flanges or optical windows. The six way cross stainless steel chamber is customizable with an attached load lock chamber, and pneumatic gate valve with sample transfer feedthrough for the transfer of samples onto a high temperature stage. Hot wire filaments (1-3) mounted on moly or inconel stands capable of reaching up to 2500°C for breaking CVD gas precursors. Power supply capable of delivering required power to reach filaments at desirable temperature and compatible to computer control. Three dedicated Mass Flow Controllers of various ranges 0-10 sccm, 0-100 sccm, 0-500 sccm, capable of computer control. Power supply and cable included.

Electro-polished (Ultra High Vacuum compatible) 12” or 18" diameter stainless steel vacuum chamber with multiport compatibility for integrated sputtering and evaporation. The vacuum chamber consist of several 8”, 6”, 4.5”, 2.7” ports, optical windows, gas leak valves, gate valves. All components made in USA with UHV standard, Heater flange:Fitted with a 2" hot zone Cylindrical flat plate heater capable of working at 900C (up to 10-8 Torr vacuum) in vacuum as well as Oxygen ambient, embedded thermocouple. Attachment for clip mounting of substrates. X, Y and Z movement of the heater after opening the chamber. Safety Enclosure on the flange to conceal the heater wires, thermocouple wires. Shutter assembly magnetic coupled. All the above should be mounted on an 8" OD (CF150) flange. Temperature controller (PID programmable) with SCR firing circuit and multi profile (8 steps).