Beneq products

Beneq Transform 300 is a highly versatile manufacturing platform intended for IDMs and foundries dedicated to CIS, Power, Micro-OLED/LED, Advanced Packaging and other MtM applications. It is a highly configurable solution that caters to multiple advanced thin-film applications ranging from gate dielectric to passivation and/or encapsulation and beyond.

Versatile, automated ALD solution for high-throughput semiconductor production.

The simple and elegant ALD solution for compound semiconductor device fabrication.

ALD research equipment that grows with you. Beneq TFS 200 is the most flexible ALD research platform ever designed for academic research and corporate R&D. Beneq TFS 200 has specifically been designed to minimize any cross contamination that could happen in a multi-user research environment. The large number of available options and upgrades means that your Beneq TFS 200 will grow with you to meet even the most demanding research requirements.