M-O-T Mikro- und Oberflächentechnik GmbH
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M-O-T Mikro- und Oberflächentechnik GmbH products

Equipment

MOT Mikro - Model µPorSi - Porous Silicon Formation System

Current application area`s are LED, Photovoltaics and Semiconductor. Porous silicon (PS) is a material formed by anodic dissolution of single crystalline silicon in HF containing solutions.

MOT Mikro - Model µECES - Electrochemcial Etch Stop System

Electrochemical etch-stop (ECES) is a popular method for bulk micromachining of a p-n junction silicon wafer in MEMS applications.