MSP Corporation products

MSP offers several high performance vaporizers, which are referred to as performance-enhanced vaporizers, or PE vaporizers. The available models include the model 2800PE, 2820PE, 2830PE and 2840PE. These PE vaporizers make use of a precision piezo-valve to control the rate of liquid flow into an atomizer to form very fine droplets for vaporization, leading to reduced thermal decomposition and by-products formation. The PE vaporizer design also increases the temperature stability of the system, while permitting the vaporizer to operate up to 300ºC in some models. The result is improved film quality as well as reduced response time of the vaporization system.

We offer a series of Turbo Vaporizers for liquid source vaporization by direct liquid injection for thin film deposition by Chemical Vaporizer Deposition (CVD), Plasma Enhanced CVD (PECVD), and Atomic Layer Deposition (ALD) processes. Each vaporizer is customized for a specific application to meet the individual needs of the customer. MSP’s vaporizers are known for their accuracy, repeatability, low maintenance, and low in-film and surface contamination features. High-capacity vaporizers are also available for industrial applications.

MSP offers several high performance vaporizers referred to as performance-enhanced vaporizers, or PE vaporizers. The available models include the model 2800PE, 2820PE, 2830PE and 2840PE. These PE vaporizers use a precision piezo-valve to control the rate of liquid flow into an atomizer to form small fine droplets for vaporization to minimize thermal decomposition and the formation of undesirable by-products.

We offer a series of Turbo Vaporizers for liquid source vaporization by direct liquid injection for thin film deposition by Chemical Vaporizer Deposition (CVD), Plasma Enhanced CVD (PECVD), and Atomic Layer Deposition (ALD) processes. Each vaporizer is customized for a specific application to meet the individual needs of the customer. MSP’s vaporizers are known for their accuracy, repeatability, low maintenance, and low in-film and surface contamination features. High-capacity vaporizers are also available for industrial applications.