Sempa Systems GmbH products

Modern LED, Laser Diode or high frequency/power devices are based on compound semiconductors which are manufactured by metal organic vapor phase epitaxy (MOVPE). The standard process utilizes on board precursor ampoules, so called bubblers to evaporize Trimethylgallium (TMGa), Trimethylaluminum (TMAl), Trimethylindium (TMIn) and many more precursors.