Tosoh SMD, Inc. products

Tosoh SMD provides splat free Aluminum target material through a combination of our advanced metallurgy, assembly technology, high yield backing plates and nondestructive testing methods. Tosoh SMD determines the specific optimum aluminum grain size, crystal structure and chemical homogeneity necessary to achieve the best uniformity and film properties for a specific OEM system. Our optimized metallurgy provides customers with a target that delivers consistent properties across the target diameter and through target thickness, target-to-target and lot-to-lot.

Copper is used for a variety of thin film applications including as a conductor material in logic and memory devices. Tosoh offers Copper targets for all major OEM PVD systems. Targets for all wafer sizes can be made in purities ranging from 4N to 6N. Through control of the target metallurgy, surface finish and assembly technology, Tosoh offers Copper targets that light off easily and provide consistent and repeatable thin films with good particle performance.

Tantalum is used for a variety of thin film applications: as a diffusion barrier material in logic, and memory devices, as a gate electrode in MOSFET devices and as a protective coating on print head devices. Tosoh offers a variety of Tantalum targets using OEM and Tosoh-modified designs for all major platforms. Purities ranging from 3N5 to 5N+ are available. Texture and grain size can be tailored for applications ranging from ultra-high performance to minimal-cost needs. Both solder bonded and Tosoh’s high power Prelude™ diffusion bonded assemblies are made with Tosoh’s well-known Cost of Ownership improvements and technologies. Exclusive DMFM techniques have been applied to design custom right-size and XTREME™ long life designs.

Tosoh offers Titanium targets for all major OEM PVD systems. Targets for all wafer sizes can be made in purities ranging from 3N to 5N+. Through control of the target metallurgy, oxygen content, surface finish and assembly technology, Tosoh offers titanium targets that light off easily, produce low particulate and provide consistent and repeatable thin films.

Tosoh SMD supplies the Large Area Coating market with metals, alloys, and transparent conductive oxide targets. Tosoh’s products are utilized in the manufacturing processes for flat panel displays and architectural Glass, and for the emerging photovoltaic market. Target materials are available in various form factors be it large or small, from planar to rotary, and for broad applications. Tosoh SMD is able to provide target materials of aluminum, chromium, and other commonly used non-refractory and refractory metals. Additionally Tosoh SMD North America and Europe, and our subsidiaries of TSMD Taiwan and TSMD Korea, act as sales representatives for transparent conductive oxide targets of indium-tin oxide (ITO), and zinc-aluminum oxide (AZO), developed and manufactured by Tosoh Corporation. Tosoh SMD works closely with each customer to optimize the target to their process. Contact Tosoh SMD today with your specific requirement. 

In North America and Europe, and through our subsidiaries of TSMD Taiwan and TSMD Korea, Tosoh SMD is the sales representative for chemical Precursor and OLED materials developed by Tosoh Corporation for advanced semiconductor and display applications. Tosoh Corporation has developed chemical Precursors to provide important process, film, and cost of ownership advantages.

In North America and Europe, and in regions served by our subsidiaries of TSMD Taiwan and TSMD Korea, Tosoh SMD is the sales representative for OLED materials developed and manufactured by the Organic Chemicals Division of Tosoh Corporation.