VLSI Standards, Inc. products

RAISE YOUR GLASS. The Silica Contamination Standard (SCS) is used to calibrate high-intensity UV tools which size and detect silica particles on the surface of bare silicon wafers. Use SCS to characterize particles, before particles characterize products.

NOURISH YOUR THIN FILM MEASUREMENT.Use the Silicon Nitride Film Thickness Standard (NFTS) to verify the accuracy of single wavelength or spectroscopic ellipsometers (SWE or SE) and reflectometers. Monitor long term reflectometer or ellipsometer stability in support of ISO and TS accreditation programs, and eliminate the unwanted effects of airborne molecular contamination (AMC) on your metrology.

NOURISH YOUR THIN FILM MEASUREMENT. Use the Silicon Nitride Film Thickness Standard (NFTS) to verify the accuracy of single wavelength or spectroscopic ellipsometers (SWE or SE) and reflectometers. Monitor long term reflectometer or ellipsometer stability in support of ISO and TS accreditation programs, and eliminate the unwanted effects of airborne molecular contamination (AMC) on your metrology.