Apex RF Genera tors and Power-Delivery Systems - Data Sheet

The versatile Apex® family of RF generators provides remarkably high power density and power-delivery consistency. Sophisticated RF conversion technology not only offers enhanced product and process reliability but also increases cost effectiveness by eliminating the need for front-end, DC-to-DC conversion components. Exceptionally fast and sensitive arc-handling technology also increases yield and lowers CoO. For superb performance in plasma-based, thin-film processes for semiconductor, flat panel display, or data storage manufacturing, the Apex platform is the ideal choice. With its unique, modular design—in a package so trim it can be mounted directly on the chamber—the Apex platform is also highly customizable to suit your specific process needs.