
RENA Technologies GmbH
DS Load - DS Unload Brochure
The RENA Direct Stack systems DS Load and DS Unload are designed for loading and unloading of PV inline tools. Key system benefits include simple wafer handling with single side wafer touching, excellent breakage rate, lowest cost of ownership and smallest footprint. The modular concept, with direct stack to lane correlation, enables unique flexibility concerning the lane quantity of the linked inline tool.
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