EFC Gases & Advanced Materials

EFC - Boron Trichloride Gas - Brochure

Boron Trichloride is a liquified gas that decomposes in water to hydrogen chloride and boric acid. It is the main gas composition in High-K and metal anisotropic plasma etch, atomic layer etch, and pulsed plasm etch. BCL3 is also mainly used for fine etching of aluminum circuits in the manufacturing process of LCD panels.

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