Forge Nano - Model THEIA - R&D Scale Wafer Coating System Brochure

THEIA combines the production-proven design and system components of our commercial solution, APOLLO, in an R&D package that delivers unmatched performance, flexibility, reliability, and safety. THEIA is field upgradeable to accommodate the ever-changing needs of scientists and engineers, enabling a seamless transition from R&D to production. Recipes created with THEIA can be sent to APOLLO for a simple and straightforward path to commercial scale production of semiconductor wafer coating.