Model R1001 Series - Generator Brochure
The Seren R1001 is a second-generation, 1000 Watt RF generator is available in 1.7-2.1, 12.56, 13.56, 27.12 and 40.68 MHz versions. This compact, air-cooled unit is designed to exceed the most stringent vacuum processing demands. The R1001 can be used as the sole source for plasma generation, as a Bias generator, or as one of several generators in ...