Model R301 - Generator Brochure
The Seren R301 is a second-generation, 300 Watt RF generator and is available in 12.56, 13.56, 27.12 and 40.68 MHz versions. This compact, air-cooled unit is designed to exceed the most stringent vacuum processing demands. The R301can be used as the sole source for plasma generation, as a Bias generator, or as one of several generators in a ...