Model R301 - Generator Brochure

The Seren R301 is a second-generation, 300 Watt RF generator and is available in 12.56, 13.56, 27.12 and 40.68 MHz versions. This compact, air-cooled unit is designed to exceed the most stringent vacuum processing demands. The R301can be used as the sole source for plasma generation, as a Bias generator, or as one of several generators in a multiple generator configuration. The front panel controls and indicators are logically grouped, with operational status shown on the front panel four line fluorescent display.  Seren “R Series” products incorporate a single surface mount technology printed circuit board for controls and RF amplifier. The RF amplifier is powered by a rugged  switch - mode power supply. Seren products are protected against excessive Voltage Standing Wave Ratio (VSWR) conditions by limiting reflected power, power amplifier current, and power amplifier transistor dissipation.