Navigator Digital Matching Networks - Data Sheet

The versatile Navigator® II matching network`s advanced technology provides rapid, accurate, and reliable matching across a wide range of power requirements up to 30 kW and frequencies up to 60 MHz. Equipped with microprocessor-controlled stepper motor drives and advanced tuning algorithms, the Navigator II matching network provides greater consistency and accuracy than traditional analog-based tuning methods. The result is optimized RF power to semiconductor, solar, FPD, and MEMs manufacturing plasma processes, including etch, PECVD, PVD, and chamber clean applications.