PC-cluster-PATACON

1 of 13Data Formats and Functions SupportedP20-5M11N-EFracturing treatment- Mirror / Rotate- Scale- Boolean operation- Resizing- Pattern fracturing- Small-figure treatment- Format conversion- Proximity effect correction- Extraction of aperture patternfor cell projection exposure- MRC (rule check)- Measurable CD auto detectionGraphic display- Pattern / Job filePATACON PC-cluster is a for converting semiconductor mask CAD datato EB data for mask writers. This system operates established PATACON software on ageneral-purpose Linux PC, and moreover operates several to some hundreds of LinuxPC's in the environment connected by a high-speed network. This allows processing large-scale LSI mask data in a short time.NIPPON CONTROL SYSTEM CORPORATIONSample hardware configurationSample hardware configurationInput data- GDS-II- OASIS(*2)- MEBES(*1)- MEBES mode5(*1)- JEOL52- JEOL52V1.1- JEOL52V2.1- JEOL52V3.0- JEOL52V3.1- HL-700- HL-800- (HL-900)- HL-7000- VSB11- VSB12- BEF(Advantest)(LM-7000) *1 Data format cannot be converted from MEBES to other EB data.*2 Under planning.Output data- GDS-II- OASIS(*2)- MEBES- MEBES mode5- JEOL52- JEOL52V1.1- JEOL52V2.1- JEOL52V3.0- JEOL52V3.1- HL-700- HL-800- (HL-900)- HL-7000- VSB11- VSB12- BEF(Advantest)(LM-7000)2 of 131. Features of PATACON PC-clusterPATACON PC-cluster's fracturing converts CAD data into EB data for various mask writers.In addition, this function can generate a new layer by applying Boolean operation to CADdata, and apply correction to existing EB data, such as resizing, shrinking, and reversal.1.1 High-speed processingPATACON PC-cluster operates established PATACON mask fracturing software on a general-purposeLinux PC, and moreover operates several to some hundreds of Linux PC in a cluster environmentconnected by a high-speed network. Processing speed is almost proportional to the number of theLinux PC's by using the NCS's own parallel processing technology, which has been developed for longyears.1.2 Support of large-scale dataThis system can support CAD data and EB data for LSI whose scale of integration grow dramatically.Some hundred gigabytes of CAD data and EB data can be processed.1.3 Conversion emphasizing high-quality and high-speed writingWriting quality and writing speed are greatly influenced by the way of pattern decomposition in thewriting strategies of electron beam writers. This system aims at high-quality high-speed writing bymaking a close collaboration with users. This system corresponds to the downsizing of mask patternsthat will progress increasingly and particularly emphasizes the small-figure treatment.- Small-figure treatment (JEOL52V1.0/V1.1/V3.0/V3.1, HL-700/800/900/7000,VSB11/12)In the data conversion phase, this system decomposes a CAD pattern into rectangles and trapezoidswriters can accept. As pattern sizes are reduced increasingly, the way for decomposing a patternand small-figures generated by pattern decomposition have an adverse impact upon writing quality.This system decomposes figures so that the generation of a small-figure is minimized and writingquality is kept best even if a small-figure is by all means generated. This small-figure treatment isapplied not only to field boundaries but also field insides.1.4 Automatic data compaction and automatic library generationThis system compacts data automatically when outputting converted EB data. A library is automaticallygenerated not only for MEBES output but also JEOL52V1.0/V1.1/V3.0/V3.1 output, HL-700/800/900/7000 output and VSB11/12 output, so that data are automatically compacted without getting help fromsomeone.1.5 Extraction of aperture figures for cell projection exposureFor writers with a cell projection exposure function, this system is equipped with a function for extractingpatterns from pattern data, which are put on the aperture mask.3 of 131.6 Highly reliable pattern processingSince this system performs highly reliable processing for data including arbitrary angles and othercomplicated figures, you can use this system for mask manufacturing at ease.1.7 Plural job execution managementPATACON PC-cluster can execute more than one job simultaneously. In addition, the priority of eachjob can be changed or aborted even while a job is being executed.1.8 Graphic displayFor displaying input and output data, this system has a variety of display functions such as outline display,paint-out display, magnification/reduction display, display of overlaid layers, small-figure display, griddisplay, and line-width measurement with the cursor. It is the merit of these functions that extensivedata can be displayed rapidly.1.9 Counting up of operation recordThis system counts the number of jobs, processing time (entry, operation, and output), the number offigures, data volume, operating time, down time, and availability in the form of daily report, weekly report,and monthly report. In addition, this system can also count information on a specified job. You cangrasp operation status and get information for accounting by this function.1.10 User interface consistent with user operation formsThe specification of required user interface varies considerably according to the objectives of the systemuse and operation form. This system is equipped with standard window interface, however, NCSdevelops customized interface as well. In addition, NCS develops an automatic generation tool ofcommand files. - Window interface for specific users (special order for value)This service changes the parameter setup method of standard window interface according to therequests from users. - Automatic command generation program (special order for value)This program gen tes "command files" for making this system convert data from a user's CADdatabase or command files of the existing system.1.11 Plenty utility programsPlenty utility programs are available, for example data analysis tools for GDS-II, MEBES, JEOL52V1.0/V1.1/V3.0/V3.1, HL-700/800/900/7000 and VSB11/12.4 of 13- Mask Pattern Data Processing Program (mpdp), which performs pattern operation and format conversion,interprets a Mask Pattern Data Processing Command (MPDC) sequentially to execute processes.- Several methods are available for creating a MPDC, in which processing procedures and parameters aredescribed.(1) Create a command file using the standard window interface (wif)- When the operator specifies a processing parameter in an interactive manner, a command file isautomatically created and processes are executed. (Jobs are spooled.)(2) Generate a command file by extracting processing procedures and parameters from the CADdatabase- A tool, which automatically generates a command file from the CAD database and the commandfile of the existing system for operating this system, can be prepared (special order for value).- Since the specification of MPDC is opened to users, users can also develop this tool by themselves.(3) Create a command file using a text editor- A command file can also be edited using a text editor.2. Command InterfaceThe operator specifiesparameters in aninteractive mannerStandard window interfaceText editorEdit the file directlyCAD databaseCommand file for theexisting systemExecute conversionFor specific usersCommand generationprogramSpoolMPDCcommand file- Processingprocedure- ParametersAutomatic operation is available by the job interface functionMethod (1)Method (2)Method (3)5 of 133. List of main commands and subcommandsCommand Subcommand Function.INIT -------- Job initialization.DEFINE OUTTYPE Defines output format and detailed informationCHECK Defines input data checkingDefine parameters SIZE Defines a chip sizeGRID Defines grid processingMT Defines information on MTOPTION Defines option informationOVERLAP Defines the size of overlap in resizingDIVIDE Defines the division of the area to be processedJOBDIVIDE Defines the division of the area to be processedCUTANGLE Defines the standard angle for the sharp tip cut in resizing.INPUT -------- Enters data.LAYER USE Defines the input data tableUSEF Defines the input data fileDefine the layer WINDOW Defines the area for processingto be used BLANK Defines the non-processed areaMOVE Moves the pattern dataROT Rotates the pattern dataMIRROR Reverses pattern data to a mirror imageARRAY Arrays the pattern dataMAG Magnifies/reduces the pattern dataMAIN Defines the main structureLAYNO Defines a layer number to be usedTLAYNO/FLAYNO Defines a specific layer number (text/pattern).OPERATE AND Calculates AND between layersOR Calculates OR between layersExecute data processing SUB Calculates SUB between layersNOT Calculates NOT between layersNOR Calculates NOR between layersNAND Calculates NAND between layersXOR Calculates XOR between layersRESIZE Resizes the layerCONVERT Converts the formatPCONVERT Converts the format (with PEC for mask writers)LFREE Frees the temporary layer tableTBLSIZE Checks whether the temporary layer table is blank or notLAYDISP Displays the layerREADAPERTURE Reads data for the HL-900 aperture maskAPERTUREMODE Defines an aperture mode during data conversion into HL-900CONVERTS HL-900 two-layer merging format conversionPCONVERTS HL-900 two-layer merging format conversion(with proximity effect correction for mask writers)* MKLAYER Returns a table after Boolean operation to a layer table6 of 13Continued from the previous pageCommand Subcommand FunctionRECT Creates the rectangle tableCD Detects measurable partsMRC Detects parts depending on Manufactuability ruleVERIFY XOR including dividing error of any angle patternVERTICAL Change the direction of boolean operation from H to V.OUTPUT COMMENT Gives comments to output dataOUTTBL Defines the output table nameOutput OUTTBLS Defines the output table name for GDSIIprocessing results GDSCONDITION Define the main structure name for GDSIIHLCONDITION Defines the condition of conversion for HL in the output fileSHOTRANK Adds shot rank information to JEOL52 outputPATTRD Defines JEOL52 V1.1 PREAD compatible outputSPPRM Defines the PATTRD parameterCONDITION Defines the conditions of conversion for JEOL52 V1.1 in the output file* .STEPPER * CALMARK AL mark pre-calculation specification* CONVMARK AL mark dedicated conversion specificationEPL conversion * USEMARK AL mark reference specification (normal conversion)* TBLNAME Input/output table specification* SFOFFSET SF offset specification* COMPTYPE Complementary division specification* STRWIDTH Stripe width specification* STRHIGHT Stripe height specification* PLACEMENT Stripe placement specification* CLIPPING Actual stripe area specification* RETNO Applicable reticlet number specification* PRMFILE Parameter file specification* EBPEC Proximity effect correction for EB stepper* PLUGIN Plug-in software support* RETICLESIZE Reticle size specification* ALPAT AL mark pre-calculation by shapes specification* ALREF AL mark individual reference specification* EBPARAM EB exposure condition parameter output* .LEEPL * CALMARK AL mark pre-calculation specification* CONVMARK AL mark dedicated conversion specificationLEEPL conversion * USEMARK AL mark reference specification* TBLNAME Input/output table specification* DIVDISABLE Division disabled area table specification* PUFOFFSET PUF offset specification* COSMOS COSMOS placement type specification* PRMFILE Parameter file specification* RETICLESIZE Reticle size specification* ALPAT AL mark pre-calculation by shapes specification* ALREF AL mark individual reference specification* DIVIDECHIP Chip division specification* MASKCRR Whole mask distortion correction specification* MEMBCRR Distortion correction by membranes specification7 of 13Special commands (pseudo-commands);@MKFRAME Adds frame data for negative resizing;@STARTDIV, ;@ENDDIV Divides the chip;@CHECKON, ;@CHECHOFF Turns on/off syntax checking temporarily;@DIRECT, ;@DEND Turns on/off conversion of preprocessingCommands for the job execution program%LD Reads a command file to execute it%ON_ERROR_GOTO Jumps when an error occurs%GOTO Jump%END Finishes executing a command file%LG Specifies a default log file name Executes a UNIX commandThe command specified with a * mark is a command or subcommand for the EPL and LEEPL option.Available commands and subcommands vary according to the system configuration.Continued from the previous pageCommand Subcommand Function.LIST -------- Outputs a table list.FREE -------- Frees the table.CEND -------- Ends the command sentence.END -------- Ends the job8 of 134. List of Software Functions 4.1 Types and contents of input dataSupport typeItem Default Option Remarks(1) GDSII O(2) MEBES O- MODE-1, 2, and extension mode O- Reticle mode O- MODE5 O(3) JEOL52V1.0 O For JBX-6AIII(4) JEOL52V1.1 O For JBX-7000MV(5) JEOL52V2.1 O For JBX-7000MV(6) JEOL52V3.0 O For JBX-9000MV(7) JEOL52V3.1 O For JBX-3030MV(8) HL-700 O For HL-700M/D(9) HL-800 O For HL-800M/D(10) HL-900 O For HL-900M/D(11) HL-7000 O For HL-7000M/D(12) VSB-11 O(13) VSB-12 O(14) LM-7000 O For LM-7000 4.2 Types and contents of output dataSupport typeItem Default Option Remarks(1) MEBES O- MODE-1, 2, and extension mode O- Reticle mode O- MODE5 O(2) JEOL52V1.0 O(3) JEOL52V1.1 O(4) JEOL52V3.0 O(5) JEOL52V3.1 O(6) HL-700 O(7) HL-800 O(8) HL-900 O(9) HL-7000 O(10) VSB-11 O(11) VSB-12 O(12) LM-7000 O9 of 13 4.3 Operation and so onSupport typeItem Default Option Remarks(1) GDSII incorrect pattern checking O(2) Mirror reversal O(3) Rotation O(4) Arraying O(5) Window O(6) Blanking O(7) Moving O(8) Boolean operation O AND, OR, XOR, SUB, NOT, NOR, and NAND(9) Resizing O(10) Scaling (magnify/reduce) O(11) EB proximity effect correction O(12) Extract aperture patterns O For HL-900for cell projection exposure(13) Manufacturing Rule Check O(14) Measurable CD detection O(15) VSB11 Verification function O For VSB11 4.4 Additional featuresSupport typeItem Default Option Remarks(1) Outer frame creation O 4.5 Man-machine interfaceSupport typeItem Default Option Remarks(1) Standard command form O(2) Standard interactive form O Generates standard commands(3) Interface for individual users O Tailored to individual needs 4.6 Job executionSupport typeItem Default Option Remarks(1) Spool mode O(2) Interactive mode O 4.7 Summary and log of operation performanceSupport typeItem Default Option Remarks(1) Standard format O(2) Format for individual users O Tailored to individual needs10 of 134.8 Graphic displaySupport typeItem Default Option Remarks(1) GDSII file display O(2) EB data file display- MEBES pattern O- MEBES job O- JEOL52V1.0 pattern O- JEOL52V1.0 job O- JEOL52V1.1 pattern O- JEOL52V1.1 job O- JEOL52V2.1 pattern O- JEOL52V2.1 job O- JEOL52V3.0 pattern O- JEOL52V3.0 job O- JEOL52V3.1 pattern O- JEOL52V3.1 job O- HL-700 pattern O- HL-800 pattern O- HL-900 pattern O- HL-7000 pattern O- VSB11 pattern O- VSB12 pattern O- LM-7000 pattern O(3) Measurement and Opattern information search(4) Grid display O(5) Patern display O(6) Micro-figure emphasized display O 4.9 UtilitySupport typeItem Default Option Remarks(1) GDS-II file creation O Simplified GDS-II file preparation (text entry)(2) GDS-II file analysis O(3) MEBES file analysis O(4) JEOL52V1.0 file analysis O(5) JEOL52V1.1 file analysis O(6) JEOL52V2.1 file analysis O(7) JEOL52V3.0 file analysis O(8) JEOL52V3.1 file analysis O(9) HL-700 file analysis O(10) HL-800 file analysis O(11) HL-900 file analysis O(12) HL-7000 file analysis O(13) VSB11 file analysis O(14) VSB12 file analysis O(15) LM-7000 file analysis O11 of 13Sample large-scale configurationSample small-scale configuration Sample medium-scale configurationClient Client??·???Client Client1st LAN2nd LAN (Gigabit)ClientServerClient1st LAN2nd LAN (Gigabit)2nd LAN (Gigabit) 2nd LAN (Gigabit)Sub-server Sub-serverServerClient Client2nd LAN (Gigabit)Sub-server1st LANClient Client2nd LAN (Gigabit)Server- Server: Manages the whole system, prepares/distributes entry data, and coordinates output data- Client: Converts assigned data- Server: Manages the whole system, prepares/distributes entry data, and coordinates output data- Sub-server: Distributes entry data- Client: Converts assigned data5. Operation EnvironmentThis software operates in a cluster environment, in which several to some hundreds of LinuxPC's are connected by a high-speed network. Processing speed is almost proportional tothe number of the Linux PC's by using the NCS's own parallel processing technology, whichhas been developed and improved for long years.- Linux PC configurationSince the license fee of the software is determined according to the number of CPU's used, it isrecommended to use high performance latest hardware. For details, contact our company.12 of 136. Software License and Sales Form6.1 Software license feeThe license fee of the software is determined according to the number of CPU's used. For details,contact our company.6.2 Sales/maintenance stylesSales/maintenance style 1: software + hardware(configured with the commercial PC servers NCS recommends)- The hardware NCS recommends is adopted and delivered as a system with the software installed.- The software and hardware are guaranteed and maintained together.- NCS always keeps hardware spare parts available in the office.Sales/maintenance style 2: software + hardware (configured with the products you specify)- The hardware you specify is adopted and delivered as a system with the software installed.- The hardware is delivered as resale.- NCS guarantees and maintains the software only. For the maintenance of the hardware, contact thehardware manufacturer directly.Sales/maintenance style 3: software only- NCS sells the software only.- The software is installed in the hardware you prepare.- The software is installed for value.- NCS guarantees and maintains the software only. For the maintenance of the hardware, contact thehardware manufacturer directly.13 of 13System specifications are subject to change without notice for improvement.Development and sale: Nippon Control System Corporation- Head Office:1-19-15 Ebisu, Shibuya-ku, Tokyo, 150-0013, Japantel: +81-3-3443-5081 fax: +81-3-3443-5189- Shin-Yokohama Office:2-7-9 Shin-Yokohama, Kouhoku-ku, Yokohama-shi, Kanagawa, 222-0033, Japantel: +81-45-477-5800 fax: +81-45-477-5811For this product, please contact the Shin-Yokohama Office.Email: horiuchi@nippon-control-system.co.jpContent of this catalog: as of May, 2004