Ultra High Purity (UHP) Gases and Semiconductor

Semiconductor and UHP gas applications are another world as compared to any other application. The challenges include; maintaining sample integrity, reducing contamination, increasing speed of response and validation at single digit to sub ppb levels. AMETEK Process Instruments manufactures a wide variety of UHP analysers that measure trace impurities like HC, CO, CO2, H2, moisture and O2 as well as residual gas analyzers (RGA). AMETEK Process Instruments can provide full integration for both mobile and fixed systems in any combination in standard packages or customized configurations.

Pharmaceutical and Biotechnology

Pharmaceutical and Biotech unit operations require that measurements be taken over a wide range of pressures and temperatures. AMETEK has designed specific inlet systems for the both the manufacturing floor and the research lab. We can arrange for complete installations including heated sample lines or work with third party contractors to make installation as smooth as possible. Availability of IQ/OQ documentation ensures a trouble-free validation process.

Prediction and Prevention of Failures in Semiconductor Bulk Gas Distribution Systems - Application Note

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