Seren - L2001 - Low Frequency Generator Brochure

RF Generator? CE Marked? Internal DC Switcher? RS-232/422/485? Dual Power Range? Programmable Pulsing? Load power leveling? Agile Frequency TuningL20011717 Gallagher Drive Vineland, NJ 08360Phone: 856.205.1131 Fax: 856.205.1141www.serenips.comSerenAdShtsRev.qxd 4/16/04 12:42 PM Page 2creoPRODUCT DESCRIPTION The Seren L2001 is a second-generation, 2000 Watt 100 – 460 kHz variable frequency LF generator. This lightweight, water-cooled unit is designed to exceed the most stringent vacuum processing demands. The L2001 can be used as the sole source for plasma generation, as a Bias generator, or as one of several generators in a multiple generator configuration. The front panel controls and indicators are logically grouped, with operational status shown on the front panel four line fluorescent display. Seren “L Series” products incorporate a single surface mount technology printed circuit board for controls and RF amplifier. The RF amplifier is powered by a switch-mode power supply. Seren “L Series” products utilize Field-Effect Transistors in the exciter and power amplifier stages. The unit operates in a class AB mode providing power accuracy and stability across the entire power range. RATING The L2001’s power amplifier is rated at 55% of its actual design capability. PROTECTION Seren generators are protected against excessive Voltage Standing Wave Ratio (VSWR) conditions by limiting reflected power, power amplifier current, and power amplifier transistor dissipation. AGENCY COMPLIANCE The Seren L2001 carries CE Marking (EMC and Safety) and meets FCC regulations for spurious radiated emissions. CONTROL INTERFACES The L2001 is a microprocessor controlled, solid-state RF generator. This product can be controlled by: (1) a selectable serial RS-232/ 422/ 485 interface, (2) a 25 pin D-sub analog interface connector, or (3) the front panel. POWER CONTROLS & PULSING The Seren L2001 can regulate its power output utilizing the following control modes: DC Voltage, RF Voltage, Forward Power Leveling, and Load Power Leveling. The L2001 is capable of 2 modes of high speed pulsing: programmable pulsing via the front panel (rate and duty cycle); and analog pulsing, where the generator tracks an incoming pulse train. Seren products also include a sync pulse output to synchronize pulsing between two or more generators. WARRANTY Seren products are warranted against defect for a period of (15) months from date of shipment. SERVICE Seren IPS products are supported by a World-Wide Network of qualified service engineers. Consult our web page for locations in your area. MODEL L2001Power Output 2000 WattsFrequency 100 – 460 kHz, 1000 Hz StepsForward Power Metering +/-1% Full Scale, +/-1% ReadingOutput Power Stability +/-0.5% Long Term, +/-1 WattHarmonics -55 dBcInput Power 190-250 VAC, 47-63 Hz Output Connector Type “N” FemaleInterface Connectors Serial: DB-9 Female; Analog: DB-25 FemalePulsing 10 kHz, 50 micro sec. / min. pulseCooling Water Cooled, 2 G.P.M. @ 40 deg. C, 110 C.F.M.Dimensions 7 H x 17 W x 23 D (in.), 18 x 43.5 x 58.5 (cm)Weight 75 lbs. (34kg) www.serenips.com SEREN IPS, Inc., 1717 Gallagher Drive, Vineland, NJ 08360, / Phone 856.205.1131 / Fax 856.205.1141