New Product Launch: Hiden EP-Replayer Transforms End Point Recipe Development for Semiconductor Etch Applications

The Hiden EP-Replayer empowers process engineers to replay previous etch data, enabling predictive EP development and recipe refinement. Using the algorithmic recipe template, users can define and adjust parameters to simulate End Point behaviour. This predictive approach brings enhanced efficiency and control to End Point detection.

Just like live data acquisition, the EP-Replayer offers complete tracking of timestamps, state transitions, and key count rates through the Events Log. Simultaneously, the Chart Marker graph displays the End Point progression, allowing users to visualise outcomes and iteratively refine their strategies.

Whether you’re improving accuracy or exploring new End Point methods, the EP-Replayer helps streamline your process saving time, reducing material waste, and increasing confidence in your final recipe.

• End Point development and optimisation
• Advanced method testing and algorithm feature validation
• Recipe troubleshooting without additional wafer use

Designed for seamless use with HAL10 IMP-EPD systems,  MASsoft data files are converted into replay-compatible formats. Users can adjust End Point settings directly within MASsoft, optimising parameters with just a few clicks.

Need even more flexibility? An additional, standalone, interface unit can be used to replay data and optimise recipes away from the etch tool, enabling continued process development without the need to interrupt ongoing live production. That means fewer workflow disruptions—and more time spent improving your process.

With the Hiden EP-Replayer, End Point development becomes faster, more efficient, and significantly more sustainable. Whether you’re troubleshooting, experimenting with advanced algorithms, or building more robust processes—the EP-Replayer puts powerful predictive insight at your fingertips.