Rotaris Energy Equipment & Supplies

1 equipment items found

ROTARIS - Ultra-High Vacuum Sputtering System

Manufactured by:Singulus Technologies AG based inKahl, GERMANY

The ROTARIS ultra-high vacuum system is a modular platform for fast, precise and fully automated thin-film sputter deposition. The ROTARIS is a bridge system for 200 mm and 300 mm wafer processing. Its main deposition chamber RSM (Rotating-Substrate-Module) can house up to 12 physical vapor deposition (PVD) cathodes with a target diameter of 100 ...

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