Advanced Energy Industries, Inc.
Solvix - DC and Pulsed-DC Power Delivery System
The Best in DC and Pulsed-DC Power Delivery Unify. A robust, coordinated suite of power generation specifically designed to enable advanced, high-tech coatings.
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- Ease of operation and configuration with modular DC and pulsed-DC solutions
- Industry-leading reliability while powering the extreme dynamics of plasma processes
- Improved film quality with industry-leading power regulation and arc management
Solvix® DC and pulsed-DC power supplies for sputtering applications offer precise accuracy and proven repeatability thanks to more than a decade in the field. With a wide range of power and frequency levels, pulsing, and multiple communications options, Solvix power supplies provide a rugged and cost-effective solution for your unique process.
- Proven reliability, accuracy, and repeatability
- Reduced substrate damage and process contamination
- Adaptability to a broad range of process requirements
- Efficient installation and service
- Worldwide support network
- DC and pulsed-DC units
- Outstanding arc handling
- Current, power, and voltage regulation modes
- Air and water cooling
- Multiple units configurable for varying high power requirements