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EbaraTech - All-in-One System of Dry Pump & Gas Abatement Systems
EBARA’s Dry Pump Integrated Gas Abatement System is a harmonized system between vacuum technology and abatement technology based upon EBARA’s best know-how. The system is designed in accordance with customer’s facility needs for customized integrated solutions.with customer’s facility needs for customized integrated solutions.
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- EBARA original integrated abatement system with EBARA dry pumps
- Reduce installation workload and time, facility load
- Operation and interlock function are integrated as system operation
- Dry pump qty. 1~8 units
- Applicable dry pump models: EV-S, ESR, EST, ESA
- Applicable abatement models: G5, GT
- Contact EBARA for more information.