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Yamato - Model PR500/510 - Gas Plasma Reactor
Compact, barrel type low temperature ashing device designed with a large chamber made of quartz considered almost completely resistant against most plasma processes.
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- Compact, space saving design with oscillation section integrated with a portion of the chamber
- Outstanding operability and safety with the automatic tuning system as standand component
- Equipped with a large quartz chamber (ø215mm) which can process big testing sampless
- Removal of photoresist
- Cleaning of parts
- Surfactant treatment
- Micro polishing
- Corresponds to wafer and glass substrate