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Apollotech - Handler E.S.C. for Package
FromAPOLLOTECH Inc.
Size: 70~650mm (W) X 70~490mm (H) X 5~25T (T), Voltage(DC): ≤ ±5kV, Drive Unit, Power Supply, Power Cable, Chucking Force: 2g/cm2.
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- Appearance
- Flatness(AL+BODY): ≤ ±10µm
- Minimum Voltage
- Withstand Voltage: ±3.5kV Test(Vacuum), ±5.0kV Test(Atmosphere)
- Auto Run: Recipe Test under Working Conditions
- Chucking Force