Meyer Burger
IonSys - Model 500 -Ion Beam Deposition System
FromMeyer Burger
The affordable IonSys 500 system is used for ion beam etching in research and development as well as in low volume production. The machine can be loaded manually or via a single-substrate load-lock. The handling can be configured for standard wafers or for standardized carriers for processing different sample sizes.
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Key Benefits
- Compact machine concept with small footprint
- Easily adaptable process equipment to many different technologies
- In-house developed key components like ion beam sources and substrate holders