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Timaris Cooling Heating Equipment & Supplies
1 equipment items found
Manufactured by:Singulus Technologies AG based inKahl, GERMANY
Multi-Target-Module with 10 DC/RF CathodesMultiple film stack deposition, without the need to break ultra-high vacuum, is one of the key advantages of the MTM process module. Additional features such as wafer heating for hot substrate deposition (option) or a collinear Aligning Magnetic Field (AMF) are available. The AMF can be activated to align the magnetic easy axis during deposition of ...