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Tactras Vigus Plasma System Equipment & Supplies
1 equipment items found
Manufactured by:Tokyo Electron Limited (TEL) based inTokyo, JAPAN
Tactras™ Vigus™ is a highly reliable 300mm plasma etch system that enhances etch process productivity. Scaling at advanced technology nodes makes the etch process more and more crucial. As the solution for etch process challenges, Tactras™ Vigus™ provides customized options for high aspect ratio holes, trench etch, mask and dielectric ...