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Model AMC -Cleanroom Monitoring Solution for Semiconductor and Microelectronic Manufacturing
With our solution, gaseous substances can be detected and identified without any enrichment directly in situ, already at a very low (ppt) concentration level. The detection including sampling and identification process takes minutes to seconds, depending on the configurated setup.
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- Identification and quantification of AMC compounds
- Very low detection limits (ppt-range)
- No external carrier gas required and no consumables; therefore low operational cost
- Multiple substance classes in one solution (Total Acids / Total Amines / Ammonia / Total Solvents / Dopants) - real identification of particular substances
- Response time within minutes
- Measuring range from 0 to 30 ppb for all substances - ppt-sensitivity!
- Analysis directly in-situ in real time
