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Model AMC -Cleanroom Monitoring Solution for Semiconductor and Microelectronic Manufacturing

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With our solution, gaseous substances can be detected and identified without any enrichment directly in situ, already at a very low (ppt) concentration level. The detection including sampling and identification process takes minutes to seconds, depending on the configurated setup.

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  • Identification and quantification of AMC compounds
  • Very low detection limits (ppt-range)
  • No external carrier gas required and no consumables; therefore low operational cost
  • Multiple substance classes in one solution (Total Acids / Total Amines / Ammonia / Total Solvents / Dopants) - real identification of particular substances
  • Response time within minutes
  • Measuring range from 0 to 30 ppb for all substances - ppt-sensitivity!
  • Analysis directly in-situ in real time