Seren Industrial Power Systems, Inc. (IPS)

Model R2001 -Generator

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The Seren R2001 is a second-generation, 2000 Watt RF generator.  It may be purchased as a fixed frequency of  12.56, 13.56, 27.12 and 40.68 MHz versions or as a variable frequency 1.7 – 2.1 MHz generator. This lightweight, water cooled unit is designed to exceed the most stringent vacuum processing demands. The R2001 can be used as the sole source for plasma generation, as a Bias generator, or as one of several generators in a multiple generator configuration. The front panel controls and indicators are logically grouped, with operational status shown on the front panel four line fluorescent display.

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Seren “R Series” products incorporate a single surface mount technology printed circuit board for controls and RF amplifier. The RF amplifier is powered by a switch-mode power supply. Seren “R Series” products utilize Field-Effect Transistors in the exciter and power amplifier stages. The unit operates in a class AB mode providing power accuracy and stability across the entire power range.