Paramount Plus - Multi-Level Pulsing and Pulse Waveform Control for Emerging Plasma Applications
From Plasma Power Generators - RF Plasma Generators
Get the broadest feature set available in a pulsed-RF product. The Paramount Plus offers precise RF regulation, sophisticated pulse manipulation, and advanced data acquisition. Designed to cover an extensive range of RF energy — frequencies of 400 kHz to 60 MHz and power levels of 1.5 to 15 kW — the Paramount Plus delivers the repeatability and reliability you require.
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Paramount Plus offers progressive technology and c...
Paramount Plus offers progressive technology and customizable features that include premier pulsing control.
- Precise RF and pulse control
- Fast response to plasma changes
- Built-in diagnostic tools
Benefits
- Precisely control RF
- Enhance plasma stability
- Expedite plasma transitions
- Reduce process times
- Improve process repeatability and chamber matching
Features
- Enhanced RF stability with tightly regulated power output
- Advanced multi-level pulsing
- Pulse synchronization and monitoring
- Real-time power and impedance measurement
- Advanced FastDAQ data acquisition system
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