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Phillip Technologies, LLC
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  5. Phillip - Model Balzers - Quartz Sensor

Phillip - Model Balzers -Quartz Sensor

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Quartz sensor for use in thin film deposition monitors and controllers, including Balzers, and Evatec instruments.

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thin film monitoring
  1. Material: Pure Silicon Dioxide monocrystal, Electronic Grade Quartz with Bechmann optimized Geometry and enhanced energy trapping of the fundamental mode.
  2. Dimensions: 0.550” +. 000/. 002” OD
  3. Contour: 2.5 - 3.0 diopter (212-177 mm radius of curvature) plano convex
  4. Finish: 7 microns rms roughness plano and contour sides
  5. No chips, scratches or etch marks within a 13.95 mm diameter clear aperture
  6. Electrodes: “Balzers” pattern back, fully coated crystal face
  1. Available Frequencies: 5 MHz, fundamental series resonance
  2. Resistance: <10*-15 Ohms, plated *alloy only
  3. Contact Resistance: <10 Ohms edge to edge on pattern side
  4. Spurious Modes: First Anharmonic >150 KHz above fundamental