Model Large - Photomask Blanks
SUBSTRATES: Soda Lime, Borosilicate (Eagle, D263, AF32, Borofloat). APPLICATIONS: Flat Panel Displays, PCB Tooling Masters, MCM Masks.
SUBSTRATE SPECIFICATIONS
SIZE: Square or Rectagular Shapes up to 24" or 610mm
THICKNESS: 0.010" - 0.220" (0.30mm - 6mm) non standard thickness is available upon request
SURFACE: All plates are polished on both sides and inspected to be free of glass defects > 5 microns
FLATNESS: <15 µ m / 100mm x100mm
FILM SPECIFICATIONS
CHROME: Vacuum Deposited, DC Sputtered in Class 100 Environment
THICKNESS/OPTICAL DENSITY: Standard: 1600Å /O.D.=4.0 ± 0.3 @ 530mm.
Custom Thicknesses up to 5 µ m
REFLECTIVITYIT
Low Reflective - LRC: 8% @ 450nm
Mid Reflective - MRC: 33% @ 450nm
High Reflective - HRC: >48% @ 450nm
Blue - R632: <5% @ 632nm
Blue/Chrome/Blue - R632/632: <5% @ 632nm Both Sides
Green - R850: <5% @ 850nm
Green/Chrome/Green - R850/850: <5% @ 850nm Both Sides
PROCESS:
Etchable in all conventional Wet Etch systems
Plasma Grade recommended for Dry Etch systems
PHOTORESIST:
5300Å AZ 1500 filtered to 0.045 microns at point of use. Fringless and Regular Spin Available.
Custom Photoresist options include all widely used positive and negative optical and E-beam resist available.
Including: AZ MIR701, AZ P4600, AZ 5206, AZ 9260, AZ nLOF 2000, AZ 6615, AZ ECI3027
S1800, HR200, IP3500, IP3600, PMMA, AR N7700, SU-8, LOR A, LOR B, PMGI