Plasma-Etch - Model BT-1 - Industrial Plasma Processing System
From Plasma Systems - High Volume Plasma Systems
The BT-1 is a complete industrial grade plasma treatment solution capable of plasma cleaning, plasma etching, reactive ion etching (RIE), and more. Its large processing shelves and spacious chamber make this model perfect for the semiconductor, electronics, solar, PCB (printed circuit board), and industrial manufacturing markets as well as any other company in need of a cost-effective, high yield plasma processing solution.
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Features
Standard Features
- Electrode Configuration Five Stacked Horizontal (20'Wx21'D + 3' Clearance) with Several Optional Configurations Available
- Generator 600W 13.56MHz Continuously Variable Power Supply with Automatic Matching Network
- Gas Control One 0-200cc Mass Flow Controller
- Control System Color PLC-Based Touch Screen Control Interface; Stores up to 20 Two-Step Recipes
- Vacuum Gauge 1-2000 mT
- Vacuum Pump 29CFM 2-Stage Direct Drive Oil Pump (Oxygen Service – Krytox Charged) 3 Micron Oil Filtration System
- Chamber Material 6061-T6
- Aluminum Chamber Dimensions 25”x25”x22”
- Unit Dimensions 70'x36”x32”
- Unit Weight Approx. 1200lbs
- Vacuum Pump Weight 150lbs
- Made in the U.S.A.
- Most systems can be customized with a wide range of options including:
- Custom Sized Vacuum Chamber, Number/Size of Electrodes To ensure your system is able to specifically meet your throughput requirements
- Reactive Ion Electrodes Enables reactive ion etching
- Larger Power Supplies Higher watt/frequency power supplies
- PC-based Control System For fully automatic system control, multi-step process sequencing, multiple recipe storage, data logging/trending, events/alarms, etc. Electrostatic Shielding
- Greatly increases process uniformity by eliminating excess etching at the outer bounds of the processed material
- Temperature Control System
- To maintain specific temperatures in the processing chamber for enhanced uniformity and application-specific needs
- Dry and Oil-Driven Vacuum Pumps and Blower Boosters
- A variety of vacuum pump options for more control over the process chamber pressure
- Chiller System for Dry Vacuum Pump
- Necessary for the operation of a dry vacuum pump
- Chamber and Vacuum Pump Purge Systems / Air Dryer / Purge Gas Generator
- To ensure thorough removal of contaminants from operating equipment, providing uniformity and increasing longevity
- Vacuum Pump Oil Mist Eliminator
- Captures oil from vacuum pump exhaust
- Vacuum Pump Oil Filtration
- Filters the vacuum pump oil down to a 3 micron level which increases the longevity of the oil and the vacuum pump
- Automatic Vacuum Control
- Provides automation of the process chamber pressure
- Additional Digital Mass Flow Controllers
- Provides digital automation and monitoring of process gases
- Gas Steering Matrix
- Designed to allow for up to 5 process gas inputs; 3 are selectable at any time by software driven controls
- Low Gas-Source Alarm
- Notification for when your process gas container needs replenished
- Light Tower
- For easy visualization of the steps of the plasma processing sequence
- Fume Scrubber
- To eliminate hazardous fumes/contaminants from the chamber/vacuum pump exhaust
Facility Requirements
- Electrical 120/208 VAC, 50/60 Hz, 3 Phase, 5 Wire, 30 Amps
- Compressed Air Service 80-100PSI, 0.5CFM
- Regulated Process Gases 15PSI
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